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Journal: Micromachines, 2025
Volume: 16
Number: 372
Article:
Research on the Method of Optimizing the Stress and Improving the Performance for MEMS Gyroscope Based on the Cantilever-Plate Structure
Authors:
by
Yunbin Kuang, Xiaoyan Huo, Weitao Guo, Xiaoxing Li, Jiangyan He, Qiong Mao, Xiaolin Ma and Jie Liu
Link:
https://www.mdpi.com/2072-666X/16/4/372
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