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Journal: Micromachines, 2025
Volume: 16
Number: 262
Article:
Method for In Situ On-Wafer Tensile Test of Thin Films
Authors:
by
Xufeng Wang, Jiakang Li, Yi Chen, Jiawei Zhou, Leijian Cheng and Dacheng Zhang
Link:
https://www.mdpi.com/2072-666X/16/3/262
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