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Journal: Micromachines, 2025
Volume: 16
Number: 248
Article:
A Mode-Localized Micro-Electromechanical System Accelerometer with Force Rebalance Closed-Loop Control
Authors:
by
Bowen Wang, Zhenxiang Qi, Kunfeng Wang, Zhaoyang Zhai, Zheng Wang and Xudong Zou
Link:
https://www.mdpi.com/2072-666X/16/3/248
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