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Journal: Micromachines, 2025
Volume: 16
Number: 248

Article: A Mode-Localized Micro-Electromechanical System Accelerometer with Force Rebalance Closed-Loop Control
Authors: by Bowen Wang, Zhenxiang Qi, Kunfeng Wang, Zhaoyang Zhai, Zheng Wang and Xudong Zou
Link: https://www.mdpi.com/2072-666X/16/3/248

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