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Journal: Micromachines, 2025
Volume: 16
Number: 186
Article:
Design and Fabrication of a Piezoelectric Bimorph Microphone with High Reliability and Dynamic Range Based on Al0.8Sc0.2N
Authors:
by
Ruixiang Yan, Yucheng Ji, Anyuan Liu, Lei Wang and Songsong Zhang
Link:
https://www.mdpi.com/2072-666X/16/2/186
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