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Journal: Micromachines, 2025
Volume: 16
Number: 186

Article: Design and Fabrication of a Piezoelectric Bimorph Microphone with High Reliability and Dynamic Range Based on Al0.8Sc0.2N
Authors: by Ruixiang Yan, Yucheng Ji, Anyuan Liu, Lei Wang and Songsong Zhang
Link: https://www.mdpi.com/2072-666X/16/2/186

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