Kästner, P.; Elsaka, B.; Iskhandar, M.S.Q.; Liebermann, S.; Donatiello, R.; Liu, S.; Hillmer, H.
Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy. Micromachines 2025, 16, 168.
https://doi.org/10.3390/mi16020168
AMA Style
Kästner P, Elsaka B, Iskhandar MSQ, Liebermann S, Donatiello R, Liu S, Hillmer H.
Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy. Micromachines. 2025; 16(2):168.
https://doi.org/10.3390/mi16020168
Chicago/Turabian Style
Kästner, Philipp, Basma Elsaka, Mustaqim Siddi Que Iskhandar, Steffen Liebermann, Roland Donatiello, Shujie Liu, and Hartmut Hillmer.
2025. "Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy" Micromachines 16, no. 2: 168.
https://doi.org/10.3390/mi16020168
APA Style
Kästner, P., Elsaka, B., Iskhandar, M. S. Q., Liebermann, S., Donatiello, R., Liu, S., & Hillmer, H.
(2025). Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy. Micromachines, 16(2), 168.
https://doi.org/10.3390/mi16020168
