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Journal: Micromachines, 2025
Volume: 16
Number: 1326

Article: The Influence and Compensation of Process on Measurement Accuracy in Digital Grating Focusing and Leveling Sensors
Authors: by Shiguang Li, Xianjie Li and Guocai He
Link: https://www.mdpi.com/2072-666X/16/12/1326

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