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Journal: Micromachines, 2025
Volume: 16
Number: 57
Article:
Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications
Authors:
by
Filipa C. Mota, Inês S. Garcia, Aritz Retolaza, Dimitri E. Santos, PatrÃcia C. Sousa, Diogo E. Aguiam, Rosana A. Dias, Carlos Calaza, Alexandre F. Silva and Filipe S. Alves
Link:
https://www.mdpi.com/2072-666X/16/1/57
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