Article Versions Notes

Kota SV, Thilsted A, Trimarco D, Pan JY, Hansen O, Hübner J, Taboryski R, Jansen H. Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity. Micromachines. 2025; 16(1):104. https://doi.org/10.3390/mi16010104

Kota, Sanjeev Vishal, Anil Thilsted, Daniel Trimarco, Jesper Yue Pan, Ole Hansen, Jörg Hübner, Rafael Taboryski, and Henri Jansen. 2025. "Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity" Micromachines 16, no. 1: 104. https://doi.org/10.3390/mi16010104

Kota, S. V., Thilsted, A., Trimarco, D., Pan, J. Y., Hansen, O., Hübner, J., Taboryski, R., & Jansen, H. (2025). Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity. Micromachines, 16(1), 104. https://doi.org/10.3390/mi16010104