Zhang, L.; Yan, K.; Ye, L.; Luo, X.; He, J.; Chou, X.
Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films. Micromachines 2024, 15, 1001.
https://doi.org/10.3390/mi15081001
AMA Style
Zhang L, Yan K, Ye L, Luo X, He J, Chou X.
Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films. Micromachines. 2024; 15(8):1001.
https://doi.org/10.3390/mi15081001
Chicago/Turabian Style
Zhang, Le, Kunxian Yan, Lei Ye, Xiangyu Luo, Jian He, and Xiujian Chou.
2024. "Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films" Micromachines 15, no. 8: 1001.
https://doi.org/10.3390/mi15081001
APA Style
Zhang, L., Yan, K., Ye, L., Luo, X., He, J., & Chou, X.
(2024). Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films. Micromachines, 15(8), 1001.
https://doi.org/10.3390/mi15081001