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Journal: Micromachines, 2024
Volume: 15
Number: 666
666
Article: Sidewall Corrugation-Modulated Phase-Apodized Silicon Grating Filter
Authors: by Wei Jiang, Jijun Feng, Shuo Yuan, Haipeng Liu, Zhiheng Yu, Cunliang Yang, Wenbo Ren, Xincheng Xia, Zhengjie Wang and Fengli Huang
Link: https://www.mdpi.com/2072-666X/15/6/666

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