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Journal: Micromachines, 2024
Volume: 15
Number: 539
539
Article: Design and Simulation of a 19-Electrode MEMS Piezoelectric Thin-Film Micro-Deformable Mirror for Ophthalmology
Authors: by Yisen Hu, Hongbo Yin, Maoying Li, Tianyu Bai, Liang He, Zhimin Hu, Yuanlin Xia and Zhuqing Wang
Link: https://www.mdpi.com/2072-666X/15/4/539

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