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Journal: Micromachines, 2024
Volume: 15
Number: 476

Article: Design and Performance Evaluation of a Deep Ultraviolet LED-Based Ozone Sensor for Semiconductor Industry Applications
Authors: by Maosen Xu, Xin Tian, Yuzhe Lin, Yan Xu and Jifang Tao
Link: https://www.mdpi.com/2072-666X/15/4/476

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