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Journal: Micromachines, 2024
Volume: 15
Number: 279

Article: Investigation of New Accelerometer Based on Capacitive Micromachined Ultrasonic Transducer (CMUT) with Ring-Perforation Membrane
Authors: by Luhao Gou, Hongliang Wang, Qi Ding, Yulong Liu, Runze Yang, Feng Zhang, Pengcheng Zhang and Gang Cao

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