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Journal: Micromachines, 2024
Volume: 15
Number: 235

Article: Water-Immersible MEMS Mirror with a Large Optical Aperture
Authors: by Yi Yang, Yichen Liu, Yongquan Su, Yang Wang, Yonggui Zhang, Hao Chen, Lihao Wang and Zhenyu Wu
Link: https://www.mdpi.com/2072-666X/15/2/235

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