Cao, L.; Zhou, X.; Wang, Y.; Yang, Z.; Chen, D.; Wei, W.; Wang, K.
Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing. Micromachines 2023, 14, 1797.
https://doi.org/10.3390/mi14091797
AMA Style
Cao L, Zhou X, Wang Y, Yang Z, Chen D, Wei W, Wang K.
Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing. Micromachines. 2023; 14(9):1797.
https://doi.org/10.3390/mi14091797
Chicago/Turabian Style
Cao, Linlin, Xiaolong Zhou, Yingjie Wang, Zhilun Yang, Duowen Chen, Wei Wei, and Kaibao Wang.
2023. "Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing" Micromachines 14, no. 9: 1797.
https://doi.org/10.3390/mi14091797
APA Style
Cao, L., Zhou, X., Wang, Y., Yang, Z., Chen, D., Wei, W., & Wang, K.
(2023). Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing. Micromachines, 14(9), 1797.
https://doi.org/10.3390/mi14091797
