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Journal: Micromachines, 2023
Volume: 14
Number: 1789
1789
Article: Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies
Authors: by Jeong-Yeon Hwang, Lena Wysocki, Erdem Yarar, Gunnar Wille, Fin Röhr, Jörg Albers and Shanshan Gu-Stoppel
Link: https://www.mdpi.com/2072-666X/14/9/1789

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