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Journal: Micromachines, 2023
Volume: 14
Number: 1623
1623
Article: Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer
Authors: by Guowen Liu, Yu Liu, Zhaohan Li, Zhikang Ma, Xiao Ma, Xuefeng Wang, Xudong Zheng and Zhonghe Jin
Link: https://www.mdpi.com/2072-666X/14/8/1623

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