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Journal: Micromachines, 2023
Volume: 14
Number: 1623
Article:
Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer
Authors:
by
Guowen Liu, Yu Liu, Zhaohan Li, Zhikang Ma, Xiao Ma, Xuefeng Wang, Xudong Zheng and Zhonghe Jin
Link:
https://www.mdpi.com/2072-666X/14/8/1623
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