Liu, G.; Liu, Y.; Li, Z.; Ma, Z.; Ma, X.; Wang, X.; Zheng, X.; Jin, Z.
Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer. Micromachines 2023, 14, 1623.
https://doi.org/10.3390/mi14081623
AMA Style
Liu G, Liu Y, Li Z, Ma Z, Ma X, Wang X, Zheng X, Jin Z.
Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer. Micromachines. 2023; 14(8):1623.
https://doi.org/10.3390/mi14081623
Chicago/Turabian Style
Liu, Guowen, Yu Liu, Zhaohan Li, Zhikang Ma, Xiao Ma, Xuefeng Wang, Xudong Zheng, and Zhonghe Jin.
2023. "Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer" Micromachines 14, no. 8: 1623.
https://doi.org/10.3390/mi14081623
APA Style
Liu, G., Liu, Y., Li, Z., Ma, Z., Ma, X., Wang, X., Zheng, X., & Jin, Z.
(2023). Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer. Micromachines, 14(8), 1623.
https://doi.org/10.3390/mi14081623