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Journal: Micromachines, 2023
Volume: 14
Number: 1540

Article: Reem-Shape Phononic Crystal for Q Anchor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator
Authors: by Mohammed Awad, Temesgen Bailie Workie, Jing-Fu Bao and Ken-ya Hashimoto
Link: https://www.mdpi.com/2072-666X/14/8/1540

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