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Journal: Micromachines, 2023
Volume: 14
Number: 1489
1489
Article: A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation
Authors: by Xiangming Liu, Shanhong Xia, Chunrong Peng, Yahao Gao, Simin Peng, Zhouwei Zhang, Wei Zhang, Xuebin Xing and Yufei Liu
Link: https://www.mdpi.com/2072-666X/14/8/1489

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