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Journal: Micromachines, 2023
Volume: 14
Number: 1222
Article:
A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators
Authors:
by
Tianren Feng, Duli Yu, Bo Wu and Hui Wang
Link:
https://www.mdpi.com/2072-666X/14/6/1222
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