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Journal: Micromachines, 2023
Volume: 14
Number: 1192
Article:
A Miniaturized Piezo Stack Impact Actuation Mechanism for Out-of-Plane Freely Moveable Masses
Authors:
by
Matthias C. Wapler, Constantin Peter, Koustav Kanjilal and Ulrike Wallrabe
Link:
https://www.mdpi.com/2072-666X/14/6/1192
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