Article Versions Notes

Li P, Li W, Chen C, Wu S, Pan P, Sun K, Liu M, Wang J, Li X. A Single-Side Micromachined MPa-Scale High-Temperature Pressure Sensor. Micromachines. 2023; 14(5):981. https://doi.org/10.3390/mi14050981

Li, Peng, Wei Li, Changnan Chen, Sheng Wu, Pichao Pan, Ke Sun, Min Liu, Jiachou Wang, and Xinxin Li. 2023. "A Single-Side Micromachined MPa-Scale High-Temperature Pressure Sensor" Micromachines 14, no. 5: 981. https://doi.org/10.3390/mi14050981

Li, P., Li, W., Chen, C., Wu, S., Pan, P., Sun, K., Liu, M., Wang, J., & Li, X. (2023). A Single-Side Micromachined MPa-Scale High-Temperature Pressure Sensor. Micromachines, 14(5), 981. https://doi.org/10.3390/mi14050981