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Journal: Micromachines, 2023
Volume: 14
Number: 903
Article:
Static and Eigenvalue Analysis of Electrostatically Coupled and Tunable Shallow Micro-Arches for Sensing-Based Applications
Authors:
by
Hassen M. Ouakad and Ayman M. Alneamy
Link:
https://www.mdpi.com/2072-666X/14/5/903
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