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Journal: Micromachines, 2023
Volume: 14
Number: 1069

Article: A High-Sensitivity MEMS Accelerometer Using a Sc0.8Al0.2N-Based Four Beam Structure
Authors: by Zhenghu Zhang, Linwei Zhang, Zhipeng Wu, Yunfei Gao and Liang Lou
Link: https://www.mdpi.com/2072-666X/14/5/1069

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