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Journal: Micromachines, 2023
Volume: 14
Number: 2221

Article: Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe
Authors: by Liang Yu, Xingyang Feng, Pengcheng Hu, Xionglei Lin and Tao Jing
Link: https://www.mdpi.com/2072-666X/14/12/2221

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