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Journal: Micromachines, 2023
Volume: 14
Number: 2036
Article:
Anchor Loss Reduction in Micro-Electro Mechanical Systems Flexural Beam Resonators Using Trench Hole Array Reflectors
Authors:
by
Mohammad Kazemi, Seyedfakhreddin Nabavi, Mathieu Gratuze and Frederic Nabki
Link:
https://www.mdpi.com/2072-666X/14/11/2036
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