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Journal: Micromachines, 2023
Volume: 14
Number: 1942
1942
Article: Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method
Authors: by Xiaonan Liu, Qiaozhen Zhang, Mingzhu Chen, Yaqi Liu, Jianqiu Zhu, Jiye Yang, Feifei Wang, Yanxue Tang and Xiangyong Zhao
Link: https://www.mdpi.com/2072-666X/14/10/1942

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