Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure
Abstract
:1. Introduction
2. Structure Design
3. Theoretical Analysis and Simulation
3.1. Static Mechanical Analysis
3.2. Dynamic Simulation Analysis
4. Fabrication and Test
4.1. Fabrication of the Prototype
4.2. Test of the Prototype
- When the applied acceleration’s direction deviates from the sensitive direction, the threshold increases with the increment of the angle, indicating that the designed three-axis sensitive inertial switch has the minimum threshold in the designed sensitive direction.
- The contact time decreases first and then increases as the angle of acceleration deviates from the sensitive direction. Significantly, when the acceleration direction deviates from the sensitive direction by more than 45 degrees, the contact time increases when the active electrode contacts two fixed electrodes simultaneously under threshold acceleration. The analysis shows that the simultaneous action of the two electrodes hinders the elastic recovery of the movable electrode, thus prolonging the contact time.
- The experimental results show that the threshold and contact time of the designed triaxial inertia switch is different from the simulation results. This is because there are errors between the experimental and design parameters, such as the line width of the suspension springs, the thickness of the mass block, the gap between the electrodes, and so on. At the same time, the test results also show that the larger the acceleration deviates from the sensitive direction, the larger the threshold, which was mutually verified with the simulation results.
- The test results show that the contact time of the inertial switch in different directions is different from the simulation analysis, which is believed to be because the effect of friction resistance between electrodes is ignored in the simulation analysis, resulting in the difference between the theoretical analysis and the actual measured value.
- When the acceleration is applied to the prototype in the direction away from the sensitive direction one of 60°, it is equivalent to the opposite direction of the sensitive direction three. The test results show that the fixed electrode contacted with the movable electrode in the sensitive direction one and two. However, the sensitive direction three does not contact all the time, indicating that the designed structure effectively improves the reverse anti-overload capability of the device.
- To sum up, the three sensitive directions of the designed device do not interfere with each other, and the threshold difference between different directions is greater than 29 g. The dynamic stability of the designed inertial switch is verified.
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Structure | Movable Electrode | Fixed Beam | Gap | |||||||
---|---|---|---|---|---|---|---|---|---|---|
Parameters | T | d | L | t2 | t | t1 | g | g1 | H | h |
Values (μm) | 100 | 25 | 800 | 15 | 20 | 10 | 25 | 20 | 120 | 20 |
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Chen, W.; Wang, R.; Wang, H.; Yang, Z. Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure. Micromachines 2023, 14, 94. https://doi.org/10.3390/mi14010094
Chen W, Wang R, Wang H, Yang Z. Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure. Micromachines. 2023; 14(1):94. https://doi.org/10.3390/mi14010094
Chicago/Turabian StyleChen, Wenguo, Rui Wang, Huiying Wang, and Zhen Yang. 2023. "Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure" Micromachines 14, no. 1: 94. https://doi.org/10.3390/mi14010094
APA StyleChen, W., Wang, R., Wang, H., & Yang, Z. (2023). Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure. Micromachines, 14(1), 94. https://doi.org/10.3390/mi14010094