Chen, W.; Wang, R.; Wang, H.; Yang, Z.
Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure. Micromachines 2023, 14, 94.
https://doi.org/10.3390/mi14010094
AMA Style
Chen W, Wang R, Wang H, Yang Z.
Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure. Micromachines. 2023; 14(1):94.
https://doi.org/10.3390/mi14010094
Chicago/Turabian Style
Chen, Wenguo, Rui Wang, Huiying Wang, and Zhen Yang.
2023. "Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure" Micromachines 14, no. 1: 94.
https://doi.org/10.3390/mi14010094
APA Style
Chen, W., Wang, R., Wang, H., & Yang, Z.
(2023). Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure. Micromachines, 14(1), 94.
https://doi.org/10.3390/mi14010094