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Journal: Micromachines, 2023
Volume: 14
Number: 94

Article: Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure
Authors: by Wenguo Chen, Rui Wang, Huiying Wang and Zhen Yang
Link: https://www.mdpi.com/2072-666X/14/1/94

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