Article Versions Notes

Yu P, Zhan F, Rao W, Zhao Y, Fang Z, Tu Z, Li Z, Guo D, Wei X. An On-Chip Microscale Vacuum Chamber with High Sealing Performance Using Graphene as Lateral Feedthrough. Micromachines. 2023; 14(1):84. https://doi.org/10.3390/mi14010084

Yu, Panpan, Fangyuan Zhan, Weidong Rao, Yanqing Zhao, Zheng Fang, Zidong Tu, Zhiwei Li, Dengzhu Guo, and Xianlong Wei. 2023. "An On-Chip Microscale Vacuum Chamber with High Sealing Performance Using Graphene as Lateral Feedthrough" Micromachines 14, no. 1: 84. https://doi.org/10.3390/mi14010084

Yu, P., Zhan, F., Rao, W., Zhao, Y., Fang, Z., Tu, Z., Li, Z., Guo, D., & Wei, X. (2023). An On-Chip Microscale Vacuum Chamber with High Sealing Performance Using Graphene as Lateral Feedthrough. Micromachines, 14(1), 84. https://doi.org/10.3390/mi14010084