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Journal: Micromachines, 2023
Volume: 14
Number: 230
230
Article: Activation Enhancement and Grain Size Improvement for Poly-Si Channel Vertical Transistor by Laser Thermal Annealing in 3D NAND Flash
Authors: by Tao Yang, Zhiliang Xia, Dongyu Fan, Dongxue Zhao, Wei Xie, Yuancheng Yang, Lei Liu, Wenxi Zhou and Zongliang Huo
Link: https://www.mdpi.com/2072-666X/14/1/230

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