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Journal: Micromachines, 2023
Volume: 14
Number: 158

Article: High Frequency MEMS Capacitive Mirror for Space Applications
Authors: by Alvise Bagolini, Anze Sitar, Luca Porcelli, Maurizio Boscardin, Simone Dell’Agnello and Giovanni Delle Monache
Link: https://www.mdpi.com/2072-666X/14/1/158

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