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Journal: Micromachines, 2023
Volume: 14
Number: 102
102
Article: Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application
Authors: by Liuhaodong Feng, Shuwen Zeng, Yongquan Su, Lihao Wang, Yang Xu, Song Guo, Shuo Chen, Yucheng Ji, Xinlin Peng, Zhenyu Wu and Shinan Wang
Link: https://www.mdpi.com/2072-666X/14/1/102

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