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Journal: Micromachines, 2022
Volume: 13
Number: 1514

Article: A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation
Authors: by Fabio Botta, Andrea Rossi and Nicola Pio Belfiore
Link: https://www.mdpi.com/2072-666X/13/9/1514

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