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Journal: Micromachines, 2022
Volume: 13
Number: 1396
Article:
Low Leakage Current and High Breakdown Field AlGaN/GaN MIS-HEMTs Using PECVD-SiNx as a Gate Dielectric
Authors:
by
Xiaohui Gao, Hui Guo, Rui Wang, Danfeng Pan, Peng Chen, Dunjun Chen, Hai Lu, Rong Zhang and Youdou Zheng
Link:
https://www.mdpi.com/2072-666X/13/9/1396
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