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Journal: Micromachines, 2022
Volume: 13
Number: 1174

Article: Digital Tri-Axis Accelerometer with X/Y-Axial Resonators and Z-Axial Capacitive Seesaw
Authors: by Dunzhu Xia, Mohan Yao and Jinhui Li
Link: https://www.mdpi.com/2072-666X/13/8/1174

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