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Journal: Micromachines, 2022
Volume: 13
Number: 1097
Article:
Nonlinear Effects of Pulsed Ion Beam in Ultra-High Resolution Material Removal
Authors:
by
Lingbo Xie, Ye Tian, Feng Shi, Ci Song, Guipeng Tie, Gang Zhou, Jianda Shao and Shijie Liu
Link:
https://www.mdpi.com/2072-666X/13/7/1097
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