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Journal: Micromachines, 2022
Volume: 13
Number: 1066

Article: Vertical and Lateral Etch Survey of Ferroelectric AlN/Al1−xScxN in Aqueous KOH Solutions
Authors: by Zichen Tang, Giovanni Esteves, Jeffrey Zheng and Roy H. Olsson III
Link: https://www.mdpi.com/2072-666X/13/7/1066

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