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Article

SAW Resonators and Filters Based on Sc0.43Al0.57N on Single Crystal and Polycrystalline Diamond

1
Institute for Optoelectronic Systems and Microtechnology, Universidad Politécnica de Madrid, Avenida Complutense, 30, 28040 Madrid, Spain
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Nanophotonics Technology Center, Universitat Politècnica de València, Camino de Vera, s/n Edificio 8F|Planta 2ª, 46022 Valencia, Spain
3
Departamento Ciencia de Materiales, Escuela Técnica Superior de Ingenieros de Caminos, Canales y Puertos, Universidad Politécnica de Madrid, Ciudad Universitaria, Calle del Profesor Aranguren 3, 28040 Madrid, Spain
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Departamento de Sensores y Sistemas de Ultrasonidos, Instituto de Tecnologías Físicas y de la Información Leonardo Torres Quevedo—ITEFI, CSIC, Calle Serrano 144, 28006 Madrid, Spain
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Instituto de Micro y Nanotecnología, IMN-CNM, CSIC Isaac Newton, 8, Tres Cantos, 28760 Madrid, Spain
6
School of Physics and Astronomy, Cardiff University, Cardiff CF24 3AA, UK
*
Author to whom correspondence should be addressed.
Academic Editor: Agnė Žukauskaitė
Micromachines 2022, 13(7), 1061; https://doi.org/10.3390/mi13071061
Received: 6 June 2022 / Revised: 28 June 2022 / Accepted: 29 June 2022 / Published: 30 June 2022
The massive data transfer rates of nowadays mobile communication technologies demand devices not only with outstanding electric performances but with example stability in a wide range of conditions. Surface acoustic wave (SAW) devices provide a high Q-factor and properties inherent to the employed materials: thermal and chemical stability or low propagation losses. SAW resonators and filters based on Sc0.43Al0.57N synthetized by reactive magnetron sputtering on single crystal and polycrystalline diamond substrates were fabricated and evaluated. Our SAW resonators showed high electromechanical coupling coefficients for Rayleigh and Sezawa modes, propagating at 1.2 GHz and 2.3 GHz, respectively. Finally, SAW filters were fabricated on Sc0.43Al0.57N/diamond heterostructures, with working frequencies above 4.7 GHz and ~200 MHz bandwidths, confirming that these devices are promising candidates in developing 5G technology. View Full-Text
Keywords: SAW devices; piezoelectricity; ScAlN thin film; diamond thin film; 5G technology; electromechanical coupling coefficient k2; Q-factor SAW devices; piezoelectricity; ScAlN thin film; diamond thin film; 5G technology; electromechanical coupling coefficient k2; Q-factor
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MDPI and ACS Style

Sinusia Lozano, M.; Fernández-García, L.; López-Romero, D.; Williams, O.A.; Iriarte, G.F. SAW Resonators and Filters Based on Sc0.43Al0.57N on Single Crystal and Polycrystalline Diamond. Micromachines 2022, 13, 1061. https://doi.org/10.3390/mi13071061

AMA Style

Sinusia Lozano M, Fernández-García L, López-Romero D, Williams OA, Iriarte GF. SAW Resonators and Filters Based on Sc0.43Al0.57N on Single Crystal and Polycrystalline Diamond. Micromachines. 2022; 13(7):1061. https://doi.org/10.3390/mi13071061

Chicago/Turabian Style

Sinusia Lozano, Miguel, Laura Fernández-García, David López-Romero, Oliver A. Williams, and Gonzalo F. Iriarte. 2022. "SAW Resonators and Filters Based on Sc0.43Al0.57N on Single Crystal and Polycrystalline Diamond" Micromachines 13, no. 7: 1061. https://doi.org/10.3390/mi13071061

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