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Journal: Micromachines, 2022
Volume: 13
Number: 966
Article:
Diffraction Efficiency of MEMS Phase Light Modulator, TI-PLM, for Quasi-Continuous and Multi-Point Beam Steering
Authors:
by
Xianyue Deng, Chin-I Tang, Chuan Luo and Yuzuru Takashima
Link:
https://www.mdpi.com/2072-666X/13/6/966
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