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Journal: Micromachines, 2022
Volume: 13
Number: 459

Article: Design of a Capacitive MEMS Accelerometer with Softened Beams
Authors: by Chenggang Wang, Yongcun Hao, Zheng Sun, Luhan Zu, Weizheng Yuan and Honglong Chang
Link: https://www.mdpi.com/2072-666X/13/3/459

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