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Journal: Micromachines, 2022
Volume: 13
Number: 378
378
Article: High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)
Authors: by Rongbo Wu, Lang Gao, Youting Liang, Yong Zheng, Junxia Zhou, Hongxin Qi, Difeng Yin, Min Wang, Zhiwei Fang and Ya Cheng
Link: https://www.mdpi.com/2072-666X/13/3/378

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