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Journal: Micromachines, 2022
Volume: 13
Number: 343
Article:
Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements
Authors:
by
Samir Abozyd, Abdelrahman Toraya and Noha Gaber
Link:
https://www.mdpi.com/2072-666X/13/3/343
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