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Journal: Micromachines, 2022
Volume: 13
Number: 329
Article:
High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO3 Single-Crystal Cantilever Beams
Authors:
by
Huifen Wei, Wenping Geng, Kaixi Bi, Tao Li, Xiangmeng Li, Xiaojun Qiao, Yikun Shi, Huiyi Zhang, Caiqin Zhao, Gang Xue and Xiujian Chou
Link:
https://www.mdpi.com/2072-666X/13/2/329
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