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Journal: Micromachines, 2022
Volume: 13
Number: 291
291
Article: Ge Ion Implanted Photonic Devices and Annealing for Emerging Applications
Authors: by Xingshi Yu, Xia Chen, Milan M. Milosevic, Weihong Shen, Rob Topley, Bigeng Chen, Xingzhao Yan, Wei Cao, David J. Thomson, Shinichi Saito, Anna C. Peacock, Otto L. Muskens and Graham T. Reed
Link: https://www.mdpi.com/2072-666X/13/2/291

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