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Journal: Micromachines, 2022
Volume: 13
Number: 217

Article: Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation
Authors: by Ping Guo, Hongling Meng, Lin Dan and Jianye Zhao
Link: https://www.mdpi.com/2072-666X/13/2/217

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