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Journal: Micromachines, 2022
Volume: 13
Number: 2174

Article: Design and Fabrication of an Integrated Hollow Concave Cilium MEMS Cardiac Sound Sensor
Authors: by Bo Wang, Pengcheng Shi, Yuhua Yang, Jiangong Cui, Guojun Zhang, Renxin Wang, Wendong Zhang, Changde He, Yirui Li and Shuotong Wang
Link: https://www.mdpi.com/2072-666X/13/12/2174

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