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Journal: Micromachines, 2022
Volume: 13
Number: 1942

Article: AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection
Authors: by Haolin Yang, Meilin Ji, Xueying Xiu, Haochen Lv, Alex Gu and Songsong Zhang
Link: https://www.mdpi.com/2072-666X/13/11/1942

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