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Journal: Micromachines, 2022
Volume: 13
Number: 1942
Article:
AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection
Authors:
by
Haolin Yang, Meilin Ji, Xueying Xiu, Haochen Lv, Alex Gu and Songsong Zhang
Link:
https://www.mdpi.com/2072-666X/13/11/1942
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